Projection printing of gold micropatterns by photochemical decomposition

Baum, Thomas H.; Marinero, Ernesto E.; Jones, Carol R.
November 1986
Applied Physics Letters;11/3/1986, Vol. 49 Issue 18, p1213
Academic Journal
Gold micropatterns have been generated by the laser photolysis of dimethylgold (III) acetylacetonate, Me2Au(acac), in the vapor phase. Linewidths as fine as 2 μm were readily obtained utilizing a simple optical projection system comprised of a 4× projection lens, a lithographic photomask, and the UV output from an excimer laser. The single-step, dry process for selectively producing metal patterns is highlighted.


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