TITLE

Projection printing of gold micropatterns by photochemical decomposition

AUTHOR(S)
Baum, Thomas H.; Marinero, Ernesto E.; Jones, Carol R.
PUB. DATE
November 1986
SOURCE
Applied Physics Letters;11/3/1986, Vol. 49 Issue 18, p1213
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Gold micropatterns have been generated by the laser photolysis of dimethylgold (III) acetylacetonate, Me2Au(acac), in the vapor phase. Linewidths as fine as 2 μm were readily obtained utilizing a simple optical projection system comprised of a 4× projection lens, a lithographic photomask, and the UV output from an excimer laser. The single-step, dry process for selectively producing metal patterns is highlighted.
ACCESSION #
9821235

 

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