Laser pulse width dependent surface ripples on silicon

Jost, D.; Lüthy, W.; Weber, H. P.; Salathé, R. P.
September 1986
Applied Physics Letters;9/15/1986, Vol. 49 Issue 11, p625
Academic Journal
Scanned irradiation of a Si (111) crystal with a focused cw mode-locked argon or neodymium:yttrium aluminum garnet laser to its melting threshold has generated a type of surface morphology, ripples, with a periodicity which is dependent on the laser pulse width. We interpret these ripples as being a thermoelastically generated surface acoustic wave frozen out on the crystal surface.


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