Improved tribological properties of sputtered MoSx films by ion beam mixing

Kobs, K.; Dimigen, H.; Hübsch, H.; Tolle, H. J.; Leutenecker, R.; Ryssel, H.
September 1986
Applied Physics Letters;9/1/1986, Vol. 49 Issue 9, p496
Academic Journal
Ion beam mixing yielded a distinct enhancement in the sliding life of sputtered MoSx films without any deterioration of the excellent lubrication properties. This effect occurs only at higher ion energies indicating an improved film-substrate adherence caused by a mixing of the interface, which was confirmed by secondary ion mass spectrometry and topographical investigations. In addition to that a considerable enhancement of the film density was found due to a reorientation of the MoSx platelets which led also to an improvement of the effective film thickness.


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