TITLE

Evidence for electron-induced x-ray emission in sputtering deposition

AUTHOR(S)
Hecq, M.
PUB. DATE
August 1986
SOURCE
Applied Physics Letters;8/25/1986, Vol. 49 Issue 8, p445
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
A new technique is shown to study in situ the chemical composition of sputtered films. The method is based on the x-ray emission induced by the fast electrons of the sputtering discharge. The sputtering chamber is coupled with a vacuum x-ray spectrometer. As a demonstration of the method, the Co deposition is studied. The Co Lα x-ray line and the deposition rate (by means of a quartz microbalance) are recorded as a function of time. X-ray intensity increases quickly during the first minutes of the deposition, then levels off gradually while the deposition rate remains constant. It is speculated that a fraction of a monolayer should be detectable.
ACCESSION #
9820653

 

Related Articles

  • Fabrication and characterization of Au-nanoparticle/W-nanodendrite structures on Al2O3 substrate. Xie, Guoqiang; Song, Minghui; Furuya, Kazuo // Journal of Materials Science;Jul2006, Vol. 41 Issue 14, p4537 

    An Au-nanoparticle/W-nanodendrite compound structure was fabricated on an insulator Al2O3 substrate using an electron-beam-induced deposition (EBID) process combined with an ion sputtering method. The as-fabricated compound structures were characterized and analyzed using conventional and...

  • Structural and ferroelectric properties of Bi[sub 4] Ti[sub 3] O[sub 12] thin films on IrO[sub 2] prepared by rf magnetron sputtering. Jo, W. // Applied Physics A: Materials Science & Processing;2001, Vol. 72 Issue 1, p81 

    Abstract. Bismuth titanate, Bi[sub 4]Ti[sub 3]O[sub 12], thin films were grown on IrO[sub 2]/SiO[sub 2]/Si substrates by radio-frequency magnetron sputtering. Crystallinity and microstructure of the films were characterized over a wide range of oxygen mixing ratio (OMR) during deposition. X-ray...

  • A (4×2) reconstruction of CuInSe2 (001) studied by low-energy electron diffraction and soft x-ray photoemission spectroscopy. Deniozou, Th.; Esser, N.; Schulmeyer, Th.; Hunger, R. // Applied Physics Letters;1/30/2006, Vol. 88 Issue 5, p052102 

    Clean and flat (001) surfaces of CuInSe2/GaAs grown by molecular-beam epitaxy could be prepared by the combination of a Se capping and decapping process and subsequent Ar+ ion sputtering and annealing. The formation of a (4×2) reconstruction was observed with low-energy electron diffraction....

  • Plasma-reactive SiC quantum dots on polycrystalline AlN films. Huang, S. Y.; Xu, S.; Long, J. D.; Sun, Z.; Chen, T. // Physics of Plasmas;Feb2006, Vol. 13 Issue 2, p023506 

    The self-assembly of SiC quantum dots (SiC QDs) formed on AlN films is investigated. Under optimized growth conditions, SiC QDs with a remarkably narrow size distribution on polycrystalline AlN films can be achieved with the presence of a wetting layer of SiC film by low-frequency inductively...

  • A combined ion-sputtering and electron-beam annealing device for the in vacuo postpreparation of scanning probes. Eder, Georg; Schlögl, Stefan; Macknapp, Klaus; Heckl, Wolfgang M.; Lackinger, Markus // Review of Scientific Instruments;Mar2011, Vol. 82 Issue 3, p033701 

    We describe the setup, characteristics, and application of an in vacuo ion-sputtering and electron-beam annealing device for the postpreparation of scanning probes (e.g., scanning tunneling microscopy (STM) tips) under ultrahigh vacuum (UHV) conditions. The proposed device facilitates the...

  • Influence of a TiO2 buffer layer on the magnetic properties of anatase Co:TiO2 thin films. Gabor, M. S.; Petrisor, T.; Tiusan, C.; Hehn, M.; Vasile, B. S. // Journal of Applied Physics;Apr2012, Vol. 111 Issue 8, p083917 

    Our study addresses the influence of a TiO2 buffer layer on the morphological, structural, and magnetic properties of Co:TiO2 films grown on (001) SrTiO3 substrates by RF sputtering. We demonstrate that a direct correlation exist between the morphology, the Co heterogeneity, and the magnetic...

  • Annealing effect on the magnetic induced austenite transformation in polycrystalline freestanding Ni-Co-Mn-In films produced by co-sputtering. Croügneau, G.; Porcar, L.; Courtois, P.; Pairis, S.; Mossang, E.; Eyraud, E.; Bourgault, D. // Journal of Applied Physics;1/21/2015, Vol. 117 Issue 3, p035302-1 

    Ni-Co-Mn-In freestanding films, with a magneto-structural transformation at room temperature were successfully produced by co-sputtering and post-annealing methods leading to film composition mastering. For a post-annealing temperature of 700 °C, the phase transformation occurs slightly above...

  • Prerequisites for high-quality magnetic tunnel junctions: XPS and NMR study of Co/Al bilayers. de Gronckel, H.A.M.; Kohlstedt, H.; Daniels, C. // Applied Physics A: Materials Science & Processing;2000, Vol. 70 Issue 4, p435 

    Abstract. Aluminum films with thicknesses ranging from 1 nm to 12 nm have been sputtered on 20 nm thick Co layers. The properties of the Co/Al bilayers were studied by X-ray photoemission spectroscopy (XPS) and spin-echo nuclear magnetic resonance (NMR). Both methods show independently that a 1...

  • Thermal cycles, interface chemistry and optical performance of Mg/SiC multilayers. Maury, H.; Jonnard, P.; Le Guen, K.; André, J.-M.; Wang, Z.; Zhu, J.; Dong, J.; Zhang, Z.; Bridou, F.; Delmotte, F.; Hecquet, C.; Mahne, N.; Giglia, A.; Nannarone, S. // European Physical Journal B -- Condensed Matter;Jul2008, Vol. 64 Issue 2, p193 

    The interplay between optical performance and the thermally activated interface chemistry of periodic Mg/SiC multilayers designed for application at 30.4 nm are investigated by optical (hard X-ray, soft X-ray and ultraviolet ranges, i.e. from 0.154 to 30.4 nm) reflectivity and X-ray emission...

Share

Read the Article

Courtesy of THE LIBRARY OF VIRGINIA

Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics