Native oxide encapsulation for annealing boron-implanted Hg1-xCdxTe

Kao, T.-M.; Sigmon, T. W.
August 1986
Applied Physics Letters;8/25/1986, Vol. 49 Issue 8, p464
Academic Journal
We report for the first time the successful use of the Hg1-xCdxTe native oxide as an encapsulation layer for an annealing process designed to activate an implanted impurity. The annealing process does not require Hg over pressure and consists of both furnace (∼200 °C) and rapid thermal (∼320 °C) anneals. Using 2.2 MeV 4He+ ion channeling measurements, we show that the implantation damage can be annealed out without loss of Hg from the substrate. Also, both secondary ion mass spectrometry and differential van der Pauw measurements indicate that the resulting electron concentration profile closely matches that of the implanted 11B profile and the electrical junction is found to lie close to the expected position of the metallurgical junction.


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