Characterization of InGaAsP surface corrugation used for distributed feedback lasers by means of Raman spectroscopy

Kubo, Minoru; Koga, Keisuke; Ogura, Mototsugu; Kohiki, Shigemi
August 1986
Applied Physics Letters;8/11/1986, Vol. 49 Issue 6, p325
Academic Journal
Thermally deformed surface corrugations on both an InP substrate and an InGaAsP layer have been analyzed by means of x-ray photoelectron spectroscopy and laser Raman spectroscopy. From the spectra of the deformed surface corrugations on an InP substrate on which a GaAs wafer was placed during its heat treatment, it has been found that material formed in the grooves is an InGaAsP alloy single crystal.


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