Stress relaxation technique for thermally grown SiO2

Landsberger, L. M.; Tiller, W. A.
July 1986
Applied Physics Letters;7/21/1986, Vol. 49 Issue 3, p143
Academic Journal
A corona discharge technique has been utilized at 800 °C to fully relax thermal oxides grown on Si wafers. In an experiment involving two oxidation steps, the corona-relaxed oxides are shown to be equivalent to ∼1200 °C thermally grown or thermally relaxed oxides, both with respect to index of refraction and oxygen diffusion coefficient. The activation energy for oxygen diffusion through a completely relaxed thermal oxide is found to be 0.8 eV.


Related Articles

  • Negative corona in air at atmospheric pressure due to a voltage impulse. Paillol, J.; Espel, P.; Reess, T.; Gibert, A.; Domens, P. // Journal of Applied Physics;May2002, Vol. 91 Issue 9, p5614 

    This article presents a numerical modeling of a negative corona caused by an overvoltage pulse (∼250%), in a point-to-plane electrode system. The field value applied to the cathode is high, thus, the numerical simulation described in this article attempts to show that the field-effect...

  • Numerical simulation of streamer–cathode interaction. Odrobina, Igor; Černák, Mirko // Journal of Applied Physics;9/15/1995, Vol. 78 Issue 6, p3635 

    Presents a study that analyzed streamer arrival at the cathode and its transformation to the stationary cathode fall in a positive point-to-plane corona discharge. Method of the study; Results and discussion; Conclusion.

  • Optical quadratic nonlinearity in multilayer corona-poled glass films. Horinouchi, S.; Imai, H. // Applied Physics Letters;6/17/1996, Vol. 68 Issue 25, p3552 

    Examines the optical quadratic nonlinearity in multilayer corona-poled glass films. Shift of positive ions toward negative electrode during corona poling; Contention on sodium ions as the main mobile ions; Observation of second harmonic signal in corona-poled samples.

  • Hydrodynamic instability of ablation fronts in inertial confinement fusion. Piriz, A. R. // Physics of Plasmas;Mar2001, Vol. 8 Issue 3, p997 

    An analytical model for the Rayleigh-Taylor instability of an ablation front is developed by decoupling the instability analysis from the corona physics. Thus, the validity of the resulting dispersion relation is not limited by a particular approximation for the unperturbed profiles. In...

  • Streamer mechanism for negative corona current pulses. Cernak, Mirko; Hosokawa, Tatsuzo; Kobayashi, Shigeo; Kaneda, Teruo // Journal of Applied Physics;6/1/1998 Part 1 of 2, Vol. 83 Issue 11, p5678 

    Reports on a study which measured the initial stages' current wave forms of breakdown, on corona formation. Measurement of the stages with a nanosecond time resolution; Details on the existence of the stepped form of negative corona Trichel pulses, in relation to the atmospheric pressure;...

  • Doping of polyaniline by corona discharge. Job, Aldo E.; Giacometti, Jose A. // Journal of Applied Physics;4/15/2000, Vol. 87 Issue 8, p3878 

    Deals with a study of the effect of different corona conditions, namely corona treatment for positive and negative polarities, air humidity, treatment time, corona current and the geometry of the corona triode, on the electrical conductivity of the polyaniline. Experimental details; Results and...

  • Positive-streamer-like phenomena in point-plane corona gaps: Trichel pulses and high-pressure cathode sheath instabilities. Cernák, Mirko; Hosokawa, Tatsuzo; Inoshima, Masayuki // Applied Physics Letters;7/23/1990, Vol. 57 Issue 4, p339 

    Current pulse shapes have been measured in negative and positive corona discharges mostly in dry air. Negative corona Trichel pulses and pulses corresponding to the primary streamer/cathode contact in a positive point-plane gap were found to exhibit remarkable similarities, indicating a...

  • Drag reduction by dc corona discharge along an electrically conducive flat plate for small... El-Khabiry, S.; Colver, G.M. // Physics of Fluids;Mar1997, Vol. 9 Issue 3, p587 

    Focuses on corona-induced drag reduction over a finite region of a semi-infinite flat plate having small Ohmic surface conductivity for low Reynolds number flow. Simulation of a corona discharge by the model; Inclusion of charge deposition and removal with the conducting surface in the possible...

  • Flow-enhanced corona discharge: The corona torch. Maezono, I.; Chang, Jen-Shih // Journal of Applied Physics;9/15/1988, Vol. 64 Issue 6, p3322 

    Discusses an experimental investigation conducted to enhance and control corona discharge by an external gas flow through small diameter cylindrical hollow electrodes called the corona torch. Information on the emergence of corona discharge as an important industrial application; Discussion on...


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics