Formation of bubbles in BF+2-implanted silicon

Nieh, C. W.; Chen, L. J.
June 1986
Applied Physics Letters;6/2/1986, Vol. 48 Issue 22, p1528
Academic Journal
Fluorine bubbles were observed in 5×1015/cm2 BF+2 -implanted (001) and (111) Si annealed at 1000–1100 °C. Bubbles were found to form in samples annealed at 1100 °C for a time as short as 10 s. The bubbles were distributed mostly near the original amorphous/crystalline interface and silicon surface. The growth of bubbles was seen to be intimately related to the presence of residual defects. Possible ramifications of bubble formation in device applications are discussed.


Related Articles

  • Segregation and defect termination of fluorine at SiO[sub 2]/Si interfaces. Ono, Y.; Tabe, M.; Sakakibara, Y. // Applied Physics Letters;1/25/1993, Vol. 62 Issue 4, p375 

    Examines the segregation and defect termination of fluorine at silicon dioxide/silicon interfaces. Distribution of fluorine at the interface region; Termination of trivalent silicon dangling bonds by fluorine atoms; Correlation between fluorine concentration to thermal diffusion.

  • Defects and leakage currents in BF2-implanted preamorphized silicon. Brotherton, S. D.; Gowers, J. P.; Young, N. D.; Clegg, J. B.; Ayres, J. R. // Journal of Applied Physics;11/15/1986, Vol. 60 Issue 10, p3567 

    Presents a study that preamorphized the surface of single-crystal silicon prior to the implantation of low-energy boron-fluorine using high-dose implants. Formation of preamorphization results in shallow junction formation with minimal channeling of the boron; Measurements of leakage current...

  • Effects of Different Boron Compounds on the Corrosion Resistance of Andalusite-Based Low-Cement Castables in Contact with Molten Al Alloy. AdabiFiroozjaei, Esmaeil; Koshy, Pramod; Sorrell, Charles // Metallurgical & Materials Transactions. Part B;Feb2012, Vol. 43 Issue 1, p5 

    Interfacial reactions between Al alloy and andalusite low-cement castables (LCCs) containing 5 wt pct BO, BC, and BN were analyzed at 1123 K and 1433 K (850 °C and 1160 °C) using the Alcoa cup test. The results showed that the addition of boron-containing materials led to the formation of...

  • Fluorinated 9-borafluorenes vs. conventional perfluoroaryl boranes — Comparative Lewis acidity. Chase, Preston A.; Romero, Patricio E.; Piers, Warren E.; Parvez, Masood; Patrick, Brian O. // Canadian Journal of Chemistry;Dec2005, Vol. 83 Issue 12, p2098 

    Perfluorinated 9-phenyl-9-borafluorene, 1, is an antiaromatic analog of the well-known tris(pentafluorophenyl)borane. Spectroscopic, structural, and electrochemical studies have been performed on 1 and its Lewis base adducts with MeCN, THF, and PMe3 with a view to assessing its comparative Lewis...

  • Ab initio determination of the energy barriers and rate constants for HOBO+HF→FBO+H2O and OBBO+HF→FBO+HBO. Linder, Douglas P.; Page, Michael // Journal of Chemical Physics;11/15/1995, Vol. 103 Issue 19, p8538 

    We report ab initio calculations of features of the potential energy surfaces for two reactions of potential importance for the combustion of boron in fluorine-containing environments; HF+HOBO→H2O+FBO and HF+OBBO→FBO+HBO. Both reactions proceed through four-center transition states...

  • Effect of LiBF4 Salt Concentration on the Properties of Plasticized MG49-TiO2 Based Nanocomposite Polymer Electrolyte. Ahmad, A.; Rahman, M. Y. A.; Low, S. P.; Hamzah, H. // ISRN Materials Science;2011, Special section p1 

    A nanocomposite polymer electrolyte (NCPE) comprising of 49% poly(methyl methacrylate) grafted natural rubber (MG49) as polymer host, titanium dioxide (TiO2) as a ceramic filler, lithium tetrafluoroborate (LiBF4) as dopant salt, and ethylene carbonate (EC) as plasticizer was prepared by solution...

  • Copper-phthalocyanine based metal-organic interfaces: The effect of fluorination, the substrate, and its symmetry. de Oteyza, D. G.; El-Sayed, A.; Garcia-Lastra, J. M.; Goiri, E.; Krauss, T. N.; Turak, A.; Barrena, E.; Dosch, H.; Zegenhagen, J.; Rubio, A.; Wakayama, Y.; Ortega, J. E. // Journal of Chemical Physics;12/7/2010, Vol. 133 Issue 21, p214703 

    Metal-organic interfaces based on copper-phthalocyanine monolayers are studied in dependence of the metal substrate (Au versus Cu), of its symmetry [hexagonal (111) surfaces versus fourfold (100) surfaces], as well as of the donor or acceptor semiconducting character associated with the...

  • Effect of fluorine on the electrical properties of anodic oxide/InAs(111)A interface. Aksenov, M.; Valisheva, N.; Levtsova, T.; Tereshchenko, O. // Semiconductors;Mar2014, Vol. 48 Issue 3, p307 

    The electrical properties of metal-insulator-semiconductor structures based on InAs(111)A with thin anodic insulator layers of various thicknesses (7-20 nm) are investigated. It is established that the oxidation of InAs in a fluorinated acid electrolyte results in decreasing density of surface...

  • The Bioactivated Interfacial Behavior of the Fluoridated Hydroxyapatite-Coated Mg-Zn Alloy in Cell Culture Environments. Jianan Li; Lei Cao; Yang Song; Shaoxiang Zhang; Changli Zhao; Fan Zhang; Xiaonong Zhang // Bioinorganic Chemistry & Applications;2011, Vol. 2011, Special section p1 

    A partially fluorine substituted hydroxyapatite- (FHA-) coated Mg-Zn alloy was prepared to investigate the interfacial behavior of degradable Mg-based biomaterials with degradable bioactive coatings in a cell culture environment. Peaks from the results of X-ray diffraction (XRD) were...


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics