Low-loss optical waveguides made with molecular beam epitaxial In0.012Ga0.988As and In0.2Ga0.8As-GaAs superlattices

Das, Utpal; Bhattacharya, Pallab K.; Dhar, Sunanda
June 1986
Applied Physics Letters;6/2/1986, Vol. 48 Issue 22, p1507
Academic Journal
We demonstrate for the first time low-loss optical guiding in In-doped GaAs. Ridge waveguides are made with single In0.012Ga0.988As ternary layers and In0.2Ga0.8As-GaAs superlattices. Attenuation constants of ∼1.3 dB/cm are measured and the principal loss mechanism is identified to be scattering at the ridge walls. It is expected that improved fabrication techniques will lead to guides with attenuation ≤0.5 dB/cm.


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