Reduction of iron solubility in silicon with oxygen precipitates

Colas, Etienne G.; Weber, Eicke R.
May 1986
Applied Physics Letters;5/19/1986, Vol. 48 Issue 20, p1371
Academic Journal
The solubilities of iron in samples treated with various oxygen precipitation treatments were compared. The solubility of iron was reduced by almost two orders of magnitude in samples containing low-temperature oxygen precipitates. It is suggested that a new phase forms, probably an oxygen-metal rich compound that is more stable than the FeSi2 silicide. This study suggests dramatic improvements for the efficiency of gettering processes.


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