TITLE

Observations of argon emission lines used for fluorine atom actinometry in low power rf discharges

AUTHOR(S)
Savas, S. E.
PUB. DATE
April 1986
SOURCE
Applied Physics Letters;4/21/1986, Vol. 48 Issue 16, p1042
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Anomalous power and frequency dependences of some argon emission lines are observed in a low power rf discharge in a 2% admixture of argon in CF4. Frequency ranges from 0.12 to 13.56 MHz for pressures of 25 and 50 mTorr and 20 W power to the plasma. Power and frequency dependences of the 7504 Ã… line differ from those for the 6416 Ã…, 6871 Ã…, and 7126 Ã… lines. These differences and argon excitation cross sections are used to examine the validity of actinometry assumptions. The 6871 Ã… or 6416 Ã… lines work better under these conditions as actinometer references, while the 7504 Ã… seems preferable for etch plasmas.
ACCESSION #
9819637

 

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