Enhancement of sliding life of MoS2 films deposited by combining sputtering and high-energy ion implantation

Chevallier, Jacques; Olesen, Svend; So\rensen, Gunnar; Gupta, Balkishan
March 1986
Applied Physics Letters;3/31/1986, Vol. 48 Issue 13, p876
Academic Journal
Solid lubricant films of MoS2 with improved adhesion to a stainless-steel substrate have been deposited by a combination of rf sputtering and ion implantation with inert gas ions in the 100-keV region. When the sputter film had obtained a thickness of 500 Ã…, it was subjected to the ionic bombardment prior to completion of the sputter deposition. Dependent on the ion dose an adhesion improvement and a sliding life enhancement of approximately a factor of 2 were obtained for the solid lubricant film.


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