Double probe model of radio frequency capacitively coupled planar discharges

Pointu, A. M.
March 1986
Applied Physics Letters;3/24/1986, Vol. 48 Issue 12, p762
Academic Journal
A simple model, using a quasi-stationary, asymmetric, double probe theory, is presented to describe radio frequency planar glow discharge with a capacitively coupled excitation electrode. It reasonably agrees with available experimental results at frequencies lower than the ionic plasma frequency.


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