Oxygen precipitation in antimony-doped silicon wafers

d’Aragona, F. Secco; Fejes, P. L.
March 1986
Applied Physics Letters;3/10/1986, Vol. 48 Issue 10, p665
Academic Journal
Measurements of oxygen concentration as well as preferential etching of lightly and medium Sb-doped wafers show that for high-temperature (1050 °C) anneals the oxygen precipitation is inversely dependent on the dopant concentration, while it is independent of the dopant concentration for low-temperature (650 °C) anneals. This is interpreted on the basis of a heterogeneous versus homogeneous precipitation mechanism.


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