Angular distribution of sputtered particles measured by quartz crystal microbalances and Auger electron spectroscopy

Taglauer, E.; Onsgaard, J.
March 1986
Applied Physics Letters;3/3/1986, Vol. 48 Issue 9, p575
Academic Journal
A method for measuring angular distributions of sputtered particles in situ under ultrahigh vacuum conditions has been developed. It is based on a simultaneous collection of the ejected atoms on a number of quartz crystal microbalances (QCM’s), arranged in a semicircular pattern. Furthermore, it is possible to monitor the chemical state of the surface of the QCM’s and to register the amount of deposited material by means of Auger electron spectroscopy. By this method the time evolution of the angular distribution can be followed from quartz crystal coverages in the submonolayer regime to depositions corresponding to many monolayers.


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