TITLE

Angular distribution of sputtered particles measured by quartz crystal microbalances and Auger electron spectroscopy

AUTHOR(S)
Taglauer, E.; Onsgaard, J.
PUB. DATE
March 1986
SOURCE
Applied Physics Letters;3/3/1986, Vol. 48 Issue 9, p575
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
A method for measuring angular distributions of sputtered particles in situ under ultrahigh vacuum conditions has been developed. It is based on a simultaneous collection of the ejected atoms on a number of quartz crystal microbalances (QCM’s), arranged in a semicircular pattern. Furthermore, it is possible to monitor the chemical state of the surface of the QCM’s and to register the amount of deposited material by means of Auger electron spectroscopy. By this method the time evolution of the angular distribution can be followed from quartz crystal coverages in the submonolayer regime to depositions corresponding to many monolayers.
ACCESSION #
9819227

 

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