Universal expressions of projected range and damage distributions

Kido, Yoshiaki; Kawamoto, Junichi
January 1986
Applied Physics Letters;1/20/1986, Vol. 48 Issue 3, p257
Academic Journal
Depth distributions of implanted ions and induced defects have been determined by backscattering (including channeling) and nuclear resonance reaction measurements followed by computer-simulated spectrum analyses. The reduced energies cover the range from 0.1 to 5. We demonstrate that the average projected range and average damage depth can be expressed universally as functions of an average reduced energy by introducing a new scaling coefficient. Simple, unified relations of relative range and damage stragglings versus average reduced energy have also been found to hold.


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