Raman microprobe analysis during the direct laser writing of silicon microstructures

Magnotta, Frank; Herman, Irving P.
January 1986
Applied Physics Letters;1/13/1986, Vol. 48 Issue 2, p195
Academic Journal
Raman microprobe techniques are used for the first time as a real-time probe during local direct laser writing and also as an in situ probe after writing. The Stokes–Raman emission observed during pyrolytic deposition of micron-dimension structures of silicon on germanium and vitreous carbon substrates is found to be weaker, more asymmetric, and to peak at a smaller Raman shift than the corresponding spectrum of the same structure similarly probed in situ after deposition. Results of detailed post-deposition Raman analysis of these silicon microstructures are presented and compared to the Raman spectra of oven-heated silicon. Potential applications of these techniques are discussed.


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