TITLE

Spatially resolved defect mapping in semiconductors using laser-modulated thermoreflectance

AUTHOR(S)
Guidotti, D.; van Driel, H. M.
PUB. DATE
December 1985
SOURCE
Applied Physics Letters;12/15/1985, Vol. 47 Issue 12, p1336
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
We demonstrate that thermoreflectance can be observed when lattice heating is effected with an amplitude modulated laser. Changes in reflectivity are probed with a cw laser, and maps of inhomogeneous ion implantation and swirl precipitates in Si wafers are obtained.
ACCESSION #
9818671

 

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