Energy spread of ions from Ga liquid metal ion sources at low emission currents

Mayer, H. P.
December 1985
Applied Physics Letters;12/15/1985, Vol. 47 Issue 12, p1247
Academic Journal
Measurements of the energy distribution of Ga liquid metal ion sources (LMIS) have been carried out using different emitters and tip currents between 0.5 and µA. For LMIS operating at low emission voltages and with low tip currents, distributions as narrow as 2.3 eV full width at halfmaximum have been observed. These narrow distributions can only be observed if the emitter tip is placed very close (0.5 mm) to the extraction electrode.


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