Silicon diffusion at polycrystalline-Si/GaAs interfaces

Kavanagh, K. L.; Mayer, J. W.; Magee, C. W.; Sheets, J.; Tong, J.; Woodall, J. M.
December 1985
Applied Physics Letters;12/1/1985, Vol. 47 Issue 11, p1208
Academic Journal
Polycrystalline-Si/GaAs interfaces have been prepared by depositing hydrogenated amorphous Si (a-Si:H) onto GaAs in a silane plasma at 450 °C and annealing at temperatures between 600 and 1020 °C. Rutherford backscattering, secondary ion mass spectroscopy, and transmission electron microscopy show that the resulting polycrystalline-Si/GaAs interface is metallurgically stable when the Si is undoped while significant interdiffusion occurs when 12 at. % As is added to the Si. The data are consistent with the Greiner/Gibbons theory [Appl. Phys. Lett. 44, 750 (1984)] that high concentrations of Si diffuse in GaAs in the form of Si-Si substitutional pairs via Ga and As vacancies.


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