TITLE

Ghost proximity correction in an electron image projector

AUTHOR(S)
Nicholas, K. H.; Ford, R. A.
PUB. DATE
December 1985
SOURCE
Applied Physics Letters;12/1/1985, Vol. 47 Issue 11, p1227
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
The electron image projector is capable of defining submicron integrated circuit patterns but proximity effects are observed with very fine geometries. The possibility of using ‘‘Ghost’’ proximity corrections has been investigated. It has been shown that features down to 0.3 μm can be reproduced without measurable proximity effects even with fully isolated features.
ACCESSION #
9818557

 

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