Ghost proximity correction in an electron image projector

Nicholas, K. H.; Ford, R. A.
December 1985
Applied Physics Letters;12/1/1985, Vol. 47 Issue 11, p1227
Academic Journal
The electron image projector is capable of defining submicron integrated circuit patterns but proximity effects are observed with very fine geometries. The possibility of using ‘‘Ghost’’ proximity corrections has been investigated. It has been shown that features down to 0.3 μm can be reproduced without measurable proximity effects even with fully isolated features.


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