Polymer film cutting and ablative etching using a 1-kHz XeCl laser

Bishop, G. J.; Dyer, P. E.
December 1985
Applied Physics Letters;12/1/1985, Vol. 47 Issue 11, p1229
Academic Journal
A 1-kHz XeCl laser has been used to investigate cutting and ablative etching of thin polymer films. Significant increases in cutting efficiency and etch rate occur at high pulse rates (>=100 Hz) apparently due to cumulative heating effects. Cut rates of 130 cm s-1 are obtained at 900 Hz for a 12-μm-thick polyethylene teraphthalate film.


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