TITLE

Early formation of chemical vapor deposition diamond films

AUTHOR(S)
Iijima, Sumio; Aikawa, Yumi; Baba, Kazuhiro
PUB. DATE
December 1990
SOURCE
Applied Physics Letters;12/17/1990, Vol. 57 Issue 25, p2646
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Nanometer-size diamond particles formed on a silicon substrate by the hot-filament chemical vapor deposition method were examined by a high-resolution electron microscope. The particles developed well-faceted cuboctahedral habits. Examination of their morphologies and microstructures provides a wealth of information on their crystal growth mechanism. The effect of the pretreatment of the substrate by diamond powder, which has been known to enhance thin-film growth, was found to be due to seeding by ‘‘diamond dust’’ on the substrate surface.
ACCESSION #
9818332

 

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