Selective Ge deposition on Si using thermal decomposition of GeH4

Ishii, Hiromu; Takahashi, Yasuo; Murota, Junichi
October 1985
Applied Physics Letters;10/15/1985, Vol. 47 Issue 8, p863
Academic Journal
Deposition characteristics of Ge using thermal decomposition of GeH4 are studied. The deposition rate of Ge in a surface reaction region at temperatures below 410 °C is formulated as a function of the deposition temperature and GeH4 partial pressure. Selective deposition of Ge occurs reproducibly in the lower temperature range below 410 °C. The cause of the suppression of selectivity and epitaxial growth at deposition temperatures above 450 °C is confirmed as oxide contamination on the substrate.


Related Articles

  • Characterization of K-Promoted Ru Catalysts for Ammonia Decomposition Discovered Using High-Throughput Experimentation. Pyrz, William; Vijay, Rohit; Binz, Jason; Lauterbach, Jochen; Buttrey, Douglas J. // Topics in Catalysis;Nov2008, Vol. 50 Issue 1-4, p180 

    We obtain H2 from low temperature NH3 decomposition using a new hollandite (KRu4O8) catalyst supported on γ-Al2O3 discovered using high-throughput experimentation and advanced TEM/SEM characterization. Relative to the base Ru° catalyst, this new catalyst shows NH3 conversion enhancements...

  • Low-temperature YBa[sub 2]Cu[sub 4]O[sub 8]-to-YBa[sub 2]Cu[sub 3]O[sub 7] decomposition.... Nae-Lih Wu; Hon-Da Yu // Applied Physics Letters;8/2/1993, Vol. 63 Issue 5, p687 

    Examines the low-temperature decomposition process of YBa[sub 2]Cu[sub 4]O[sub 8] to YBa[sub 2]Cu[sub 3]O[sub 7-delta]. Enhancement of grain critical current densities; Use of accelerated synthesis in preparing silver composite samples; Effects of incongruent melting on intergrain J[sub c];...

  • Thermal Degradation and Decomposition Kinetics of Freeze Dried Cow and Camel Milk as well as Their Constituents. Sunooj, K. V.; George, J.; Sajeev Kumar, V. A.; Radhakrishna, K.; Bawa, A. S. // Journal of Food Science & Engineering;2011, Vol. 1 Issue 2, p77 

    A study was conducted to evaluate thermal properties and degradation kinetic parameters of FD cow milk and camel milk powder. FT-IR was used to confirm the fat removal from the whole milk powder. Differential Scanning Calorimetry (DSC) was used to study the thermal transitions. DSC thermograms...

  • Formation of intermediate ordered states on spinodal decomposition of alloys. Razumov, I. // Journal of Engineering Physics & Thermophysics;Jul2008, Vol. 81 Issue 4, p826 

    A model of diffusion phase transformations in alloys with a tendency toward ordering is suggested. It accounts for the vacancy mechanism of diffusion and the possible competition of the processes of ordering and decomposition. It is shown that the spinodal decomposition into components A and B...

  • Low temperature nitriding of iron through a thin nickel layer. Inia, D.K.; Propper, M.H. // Applied Physics Letters;3/10/1997, Vol. 70 Issue 10, p1245 

    Presents a method for nitriding iron at low temperatures. Application of a thin nickel layer coat; Prevention of oxidation of iron impurities in the NH[sub 3] gas; Role of the nickel layer as catalyst for the decomposition of NH[sub 3]; Diffusion of atomic nitrogen following decomposition.

  • Experimental and theoretical study on the reactivity of phosphorus-containing cubane type clusters [RMPR’]4 (M = Ga, In) toward pyridine. Timoshkin, A. Yu.; Kazakov, I. V.; von Hänesch, C. // Russian Journal of General Chemistry;Jun2009, Vol. 79 Issue 6, p1067 

    Reactions of cubane type clusters [EtGaPSi(Me)2Thex]4 [Thex = CMe2(Pr- i)] and {EtInP[Si( i-Bu)3]}4 with pyridine were studied. The temperature dependences of vapor pressure over individual solid compounds were measured using a membrane pressure gauge. At a temperature above 200°C the...

  • Low Temperature Water—Gas Shift: Role of Pretreatment on Formation of Surface Carbonates and Formates. Jacobs, Gary; Patterson, Patricia M.; Williams, Leann; Sparks, Dennis; Davis, Burtron H. // Catalysis Letters;Jul2004, Vol. 96 Issue 1/2, p97 

    Recently, the role of ceria vacancies on water–gas shift activity has been explained in terms of a redox mechanism, whereby CO adsorbed on a metal reduces the ceria surface to generate CO2, and water reoxidizes the ceria surface to CeO2, liberating hydrogen in the process. In this study,...

  • Synthesis and characterisation of highly dispersed Ni/SiO2 catalysts prepared by gas-phase impregnation/decomposition (GPI/D) of a Ni(II) ß-diketonate precursor complex. Stievano, Lorenzo; Kemache, Nassima; Chakroune, Nassira; Lambert, Jean-Françcois // Catalysis Letters;Mar2005, Vol. 100 Issue 3/4, p169 

    Silica-supported nickel catalysts have been prepared by a solventless technique involving the deposition of the [Ni(tmen)(acac)2] precursor from the gas phase. According to UV-vis and IR spectroscopy and to elemental analysis, the initial deposition step results in the grafting of Ni(II)...

  • Solution processable interface materials for nanoparticulate organic photovoltaic devices. Nicolaidis, Nicolas; Vaughan, Ben; Mulligan, Cara J.; Bryant, Glenn; Zillger, Tino; Trnovec, Bystrik; Hübler, Arved C.; Holmes, Natalie; Cooling, Nathan A.; Griffith, Matthew J.; Bilen, Chhinder; Kumar, Pankaj; Feron, Krishna; Xiaojing Zhou; Elkington, Daniel; Belcher, Warwick J.; Dastoor, Paul C. // Applied Physics Letters;1/27/2014, Vol. 104 Issue 4, p043902-1 

    Nanoparticulate zinc oxide can be prepared at low temperatures from solution processable zinc acetylacetonate. The use of this material as a cathode interfacial layer in nanoparticulate organic photovoltaic devices results in comparable performances to those based on reactive calcium layers....


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics