Sliding life enhancement of a WS2 sputtered film by ion beam mixing

Hirano, Motohisa; Miyake, Shojiro
October 1985
Applied Physics Letters;10/1/1985, Vol. 47 Issue 7, p683
Academic Journal
The ion beam mixing effect on the tribological properties of the WS2 sputtered film is investigated. The film morphology and crystal structure related to the tribological properties are also examined. It is determined that a film so prepared has both lower friction and longer sliding life than an as-sputtered WS2 film. Scanning electron micrograph and reflection high-energy electron diffraction examinations suggest that the ion beam mixing effect can be attributed to crystalline precipitate formation resulting from recrystallization caused by the implantation.


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