TITLE

Acoustic microscopy in air at 2 MHz

AUTHOR(S)
Fox, J. D.; Kino, G. S.; Khuri-Yakub, B. T.
PUB. DATE
September 1985
SOURCE
Applied Physics Letters;9/1/1985, Vol. 47 Issue 5, p465
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
A reflection acoustic microscope system that operates directly in air at standard atmospheric pressure is described. The system utilizes a focused acoustic transducer operating at 2 MHz and the associated electronic system measures both the phase and amplitude of the reflected air signal. The transverse resolution of the imaging system is 400 μm, while the phase-based vertical resolution is approximately 0.6 μm. Applications of this air microscope to noncontacting surface profiling and film thickness measurements are presented.
ACCESSION #
9818108

 

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