Laser chemical vapor deposition of gold

Baum, Thomas H.; Jones, Carol R.
September 1985
Applied Physics Letters;9/1/1985, Vol. 47 Issue 5, p538
Academic Journal
High quality gold spots and lines have been deposited from gaseous dimethyl (2, 4-pentanedionato) gold (III) using a focused argon ion laser. Growth rates of 1 μm/s at power densities of 4×105 W/cm2 were obtained. Resistivity, threshold writing power densities, and deposition rates were measured and their relationship to the physical and chemical properties of the gaseous complex are explored.


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