TITLE

Properties of carbon films by dc plasma deposition

AUTHOR(S)
Fujii, Kazutaka; Shohata, Nobuaki; Mikami, Masao; Yonezawa, Masatomo
PUB. DATE
August 1985
SOURCE
Applied Physics Letters;8/15/1985, Vol. 47 Issue 4, p370
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Perfectly smooth transparent carbon films deposit onto room-temperature silicon wafers in a dc plasma of methane (CH[sub 4]) and hydrogen (H[sub 2]). Transmission electron microscope analysis reveals that the films consist primarily of amorphous carbon (a-C). The nearest neighbor C-C bond length of a-C formed at low discharge current densities or low working pressures approaches that of diamond. Electrical resistivity, calculated using V-I curves for the Al-C-Si structure, is more than I0[sup 13] ω cm. A face-centered-cubic phase with a lattice constant of 4.96 Â and diamond, both of which form at relatively high pressures, consist of crystallites having a diameter of about 100 Â.
ACCESSION #
9817983

 

Related Articles

  • Scanning Tunneling Microscopy of Films of Amorphous Carbon Doped with Copper. Golubok, A. O.; Gorbenko, O. M.; Zvonareva, T. K.; Masalov, S. A.; Rozanov, V. V.; Yastrebov, S. G.; Ivanov-Omskii, V. I. // Semiconductors;Feb2000, Vol. 34 Issue 2, p217 

    The results of experimental studies of the copper-doped hydrogenated amorphous carbon films by scanning tunneling microscopy and spectroscopy are reported. These results are indicative of the effect of spatial ordering of nanostructures in thin films based on carbon and copper. Geometric...

  • Swift heavy ion induced modification of C[sub 60] thin films. Bajwa, Navdeep; Dharamvir, K.; Jindal, V. K.; Ingale, Alka; Avasthi, D. K.; Kumar, Ravi; Tripathi, A. // Journal of Applied Physics;7/1/2003, Vol. 94 Issue 1, p326 

    Modification of thin film samples of C[sub 60] on Si and quartz substrates, induced by irradiation of 110 MeV Ni ions at various fluences, was studied. The pristine and irradiated samples were investigated using Raman spectroscopy, electrical conductivity, and optical absorption spectroscopy....

  • The Effect of Bombardment with Carbon Ions on the Nanostructure of Diamond-like Films. Faizrakhmanov, I. A.; Bazarov, V. V.; Zhikharev, V. A.; Khaibullin, I. B. // Semiconductors;May2001, Vol. 35 Issue 5, p591 

    The effect of irradiation with carbon ions on the nanocluster structure of diamond-like carbon films was studied. It is shown that the electronic properties (optical absorption and electrical conductivity at low temperatures) of the films depend heavily on the ion dose, which is a consequence of...

  • Effects of propane and methane on carbonization and surface morphology in heteroepitaxial growth.... Bahavar, B.; Chaudhry, M.I. // Applied Physics Letters;8/16/1993, Vol. 63 Issue 7, p914 

    Examines the effect of propane and methane on carbonization and surface morphology of beta-silicon carbide semiconductor films grown on (100) silicon via chemical vapor deposition. Comparison of film growth rates and carrier concentrations; Explanation of the surface growth pattern in terms of...

  • Polymerized carbon nanobells and their field-emission properties. Xucun Ma; Enge Wang; Wuzong Zhou; Jefferson, David A.; Chen, Jun; Shaozhi Deng; Ningsheng Xu; Yuan, Jun // Applied Physics Letters;11/15/1999, Vol. 75 Issue 20, p3105 

    Studies the field-emission properties of polymerized carbon nanofiber semiconductor film. Spatial distribution of emission sites of a nanofiber film; Field-emission patterns in carbon nanobells; Current-field characteristic of a carbon-nitrogen nanofiber film.

  • High friction of a vertically aligned carbon-nanotube film in microtribology. Kinoshita, Hiroshi; Kume, Ippei; Tagawa, Masahito; Ohmae, Nobuo // Applied Physics Letters;10/4/2004, Vol. 85 Issue 14, p2780 

    The frictional behavior of a vertically aligned carbon-nanotube (VACNT) film against gold tips was studied in air. In these experiments, the film was 6 μm thick, the tip radii 4.5–30 μm, the applied forces smaller than 5 μN, and speeds were 0.15–24 μm/s. In spite of the...

  • Synthesis of single-walled carbon nanotubes in mesoporous silica film and their field emission property. Tamura, M.; Kemmochi, Y.; Murakami, Y.; Chino, N.; Ogura, M.; Naik, S.P.; Takai, M.; Tsuji, Y.; Maruyama, S.; Okubo, T. // Applied Physics A: Materials Science & Processing;Aug2006, Vol. 84 Issue 3, p247 

    We have succeeded in direct synthesis of single-walled carbon nanotubes (SWNTs) on a conductive substrate coated with a 3D mesoporous silica film, and observed the field emission. Co catalysts for the growth of SWNTs are deposited on the substrate by electroplating. The particle size of the...

  • Near-surface characterization of amorphous carbon films by neutron reflectivity. Johnson, J. A.; Woodford, J. B.; Erdemir, A.; Fenske, G. R. // Applied Physics Letters;7/21/2003, Vol. 83 Issue 3, p452 

    A high-density top-surface layer of approximately 30 Ã… was found in a form of diamondlike carbon, "near-frictionless carbon," developed at Argonne National Laboratory. Three diamondlike-carbon films were prepared by plasma-enhanced chemical vapor deposition with different hydrogen-to-methane...

  • Growth of thick MOD-derived CeO buffer layer with less residual carbon for coated conductors. Wang, H.; Cao, L.; Wang, Y.; Jin, L.; Liu, J.; Huang, J.; Li, C.; Yu, Z.; Zhang, P. // Journal of Materials Science: Materials in Electronics;Nov2015, Vol. 26 Issue 11, p8949 

    120 nm thick CeO buffer layer with less residual carbon has been prepared on biaxially textured NiW substrate using a newly developed heat-treatment route by a metal organic deposition approach. The thickness enhancement of CeO buffer layer was achieved by multiple coatings. The residual carbon...

Share

Read the Article

Courtesy of VIRGINIA BEACH PUBLIC LIBRARY AND SYSTEM

Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics