TITLE

Laser enhanced metalorganic chemical vapor deposition crystal growth in GaAs

AUTHOR(S)
Aoyagi, Yoshinobu; Masuda, Satoshi; Namba, Susumu; Doi, Atsutoshi
PUB. DATE
July 1985
SOURCE
Applied Physics Letters;7/15/1985, Vol. 47 Issue 2, p95
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
An enhanced crystal growth of GaAs is observed in metalorganic chemical vapor deposition (MOCVD) under laser illumination. It is difficult to understand this enhancement effect only by a pyrolitic effect and we should consider photochemical processes like photoassisted catalytic or surface effect. This laser enhancement makes patterned crystal growth in MOCVD possible.
ACCESSION #
9817848

 

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