Morphological phases of tungsten thin films on gallium arsenide

Derkits, Gustav E.; Harbison, J. P.; Hwang, D. M.
July 1985
Applied Physics Letters;7/1/1985, Vol. 47 Issue 1, p19
Academic Journal
Tungsten thin layers deposited on GaAs single crystal substrates in ultrahigh vacuum display a variety of distinct morphologies depending on substrate temperature and metal layer thickness. We present a preliminary study of some of these structures, including boundary layers in the metal, columnar growth, and an unusual phase that shows a strong orientational correlation with the substrate. We also discuss the effects of these structures on applications of W metallization to devices and processes of III-V semiconducting compounds.


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