TITLE

Reactions of XeF2 chemisorbed on Si(111) 7×7

AUTHOR(S)
Roop, B.; Joyce, S.; Schultz, Jocelyn C.; Shinn, N. D.; Steinfeld, J. I.
PUB. DATE
June 1985
SOURCE
Applied Physics Letters;6/15/1985, Vol. 46 Issue 12, p1187
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
The stable overlayer composition resulting from dissociative chemisorption of XeF2 on the Si(111)7×7 surface has been studied by x-ray photoelectron spectroscopy and thermal desorption spectrometry. Evidence is found for the existence of fluorine covalently bonded in the bulk; no evidence for unreacted interstitial fluorine is found.
ACCESSION #
9817684

 

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