Detection of thermal waves through optical reflectance

Rosencwaig, Allan; Opsal, Jon; Smith, W. L.; Willenborg, D. L.
June 1985
Applied Physics Letters;6/1/1985, Vol. 46 Issue 11, p1013
Academic Journal
We show that thermal wave detection and analysis can be performed, in a noncontact and highly sensitive manner, through the dependence of sample optical reflectance on temperature. Applications to the study of microelectronic materials are illustrated by an example of measuring the thickness of thin metal films.


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