Nanometer lithography with the scanning tunneling microscope

Ringger, M.; Hidber, H. R.; Schlögl, R.; Oelhafen, P.; Güntherodt, H.-J.
May 1985
Applied Physics Letters;5/1/1985, Vol. 46 Issue 9, p832
Academic Journal
Nanometer structures have been produced with the scanning tunneling microscope. These structures have been identified by high resolution scanning electron microscopy. This effect seems to have a potential in high resolution microfabrication of semiconductor and superconductor devices.


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