TITLE

Nanometer lithography with the scanning tunneling microscope

AUTHOR(S)
Ringger, M.; Hidber, H. R.; Schlögl, R.; Oelhafen, P.; Güntherodt, H.-J.
PUB. DATE
May 1985
SOURCE
Applied Physics Letters;5/1/1985, Vol. 46 Issue 9, p832
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Nanometer structures have been produced with the scanning tunneling microscope. These structures have been identified by high resolution scanning electron microscopy. This effect seems to have a potential in high resolution microfabrication of semiconductor and superconductor devices.
ACCESSION #
9817453

 

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