FexN thin films with perpendicular magnetic anisotropy

Asada, Seiichi; Kitada, Masahiro
April 1985
Applied Physics Letters;4/15/1985, Vol. 46 Issue 8, p792
Academic Journal
FexN(x=2–3) thin films with perpendicular magnetic anisotropy are prepared by rf sputtering. Although conventional rf sputtered FexN films are magnetized in the direction of the film plane, dc biasing of the substrate during rf sputtering produces magnetic anisotropy normal to the film plane.


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