TITLE

FexN thin films with perpendicular magnetic anisotropy

AUTHOR(S)
Asada, Seiichi; Kitada, Masahiro
PUB. DATE
April 1985
SOURCE
Applied Physics Letters;4/15/1985, Vol. 46 Issue 8, p792
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
FexN(x=2–3) thin films with perpendicular magnetic anisotropy are prepared by rf sputtering. Although conventional rf sputtered FexN films are magnetized in the direction of the film plane, dc biasing of the substrate during rf sputtering produces magnetic anisotropy normal to the film plane.
ACCESSION #
9817395

 

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