TITLE

Photochemical generation and deposition of copper from a gas phase precursor

AUTHOR(S)
Jones, C. R.; Houle, F. A.; Kovac, C. A.; Baum, T. H.
PUB. DATE
January 1985
SOURCE
Applied Physics Letters;Jan1985, Vol. 46 Issue 1, p97
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
The photochemical generation and deposition of copper metal from a volatile copper coordination complex are described. Pulsed and cw ultraviolet light sources were used to induce deposition. The chemical compositions of the films are compared for all methods.
ACCESSION #
9817316

 

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