TITLE

Observation of the trend of interface formation in anodic native oxide on InSb by marker experiments

AUTHOR(S)
Shapira, Yoram; Bregman, J.; Calahorra, Z.
PUB. DATE
January 1985
SOURCE
Applied Physics Letters;Jan1985, Vol. 46 Issue 1, p48
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
We have investigated the trend of anodization of InSb by predeposition of a very thin Cr layer, acting as a marker. Results of Auger electron spectroscopy show that the oxidation process is carried out by oxygen in diffusion through the oxide film. The details and implications of this observation are discussed.
ACCESSION #
9817302

 

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