Observation of the trend of interface formation in anodic native oxide on InSb by marker experiments

Shapira, Yoram; Bregman, J.; Calahorra, Z.
January 1985
Applied Physics Letters;Jan1985, Vol. 46 Issue 1, p48
Academic Journal
We have investigated the trend of anodization of InSb by predeposition of a very thin Cr layer, acting as a marker. Results of Auger electron spectroscopy show that the oxidation process is carried out by oxygen in diffusion through the oxide film. The details and implications of this observation are discussed.


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