TITLE

Composition of amorphous (Si,Ge):H films from nuclear elastic scattering of 12 MeV protons

AUTHOR(S)
Schwarz, R.; Wagner, S.; Kouzes, R. T.; Wieting, R. D.
PUB. DATE
March 1985
SOURCE
Applied Physics Letters;3/15/1985, Vol. 46 Issue 6, p552
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Nuclear elastic scattering of 12 MeV protons was employed for the first time to study the composition of thin films of hydrogenated amorphous Si-Ge alloys. The concentrations of H, Si, and Ge were measured simultaneously. The detection limit is about 25 ppm for a 10-min run. Free-standing films or films on a flat substrate with a total thickness of up to 20 μm can be analyzed.
ACCESSION #
9817280

 

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