Pulsed laser atom probe analysis of GaAs and InAs

Cerezo, A.; Grovenor, C. R. M.; Smith, G. D. W.
March 1985
Applied Physics Letters;3/15/1985, Vol. 46 Issue 6, p567
Academic Journal
A pulsed laser atom probe has been used to obtain the first stoichiometrically correct analysis of GaAs and InAs. These results are presented, together with a comparison of results obtained from conventional and pulsed laser atom probes.


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