Transmission electron microscopy study of periodic amorphous multilayers

Cheng, Ruguang; Wen, Shulin; Feng, Jingwei; Fritzsche, H.
March 1985
Applied Physics Letters;3/15/1985, Vol. 46 Issue 6, p592
Academic Journal
Transmission electron micrographs of a multilayer film consisting of 360 alternating layers of plasma deposited hydrogenated amorphous silicon and silicon nitride show that each 28-Ã…-thick layer is remarkably flat and uniform. Within the first 1000 Ã… near the glass substrate the regular growth of the layers is disturbed by instabilities which resemble dislocations in the layering. Electron microscopy of compositional layering may prove to be an important tool for studying the growth mechanism during plasma deposition.


Related Articles

  • Amorphous Tb20Fe80/Al2O3 multilayers (abstract). Krishnan, R.; Porte, M.; Tessier, M.; Vitton, J. P.; Lecars, Y. // Journal of Applied Physics;11/15/1988, Vol. 64 Issue 10, p6122 

    Presents an abstract of the study 'Amorphous Tb20Fe80/Al2O3 Multilayers,' by R. Krishnan, M. Porte, M. Tessier, J. P. Vitton and Y. Lecars.

  • A study of interlayer exchange coupling in a Co/Cr/Co trilayer using transmission electron... Daykin, A.C.; Jakubovics, J.P.; Petford-Long, A. K. // Journal of Applied Physics;9/1/1997, Vol. 82 Issue 5, p2447 

    Studies the interlayer exchange coupling in a Co/Cr/Co trilayer using transmission electron microscopy. Magnetic induction maps; Parallel alignment of the magnetization in the two Co layers at remanence; Presence of an energy barrier.

  • Silicide formation in Co/amorphous Si multilayers. Wang, W. H.; Wang, W. K. // Journal of Applied Physics;8/1/1994, Vol. 76 Issue 3, p1578 

    Presents information on a study which examined the interfacial reactions in cobalt/amorphous silicon multilayers by transmission electron microscopy. Background of the study; Methodology of the study; Results and discussion.

  • Optical transmissions in metal/insulator (Fe/MgF2) multilayered thin films. Nishikawa, M.; Kita, Eiji; Tasaki, Akira // Journal of Applied Physics;10/15/1995, Vol. 78 Issue 8, p5198 

    Details a study which examined the optical transmission for iron/MgF[sub2] multilayered thin films. Formulation of the multilayered thin films; Magnetization curves at room temperature; Findings of transmission electron microscopy on the thin films.

  • Epitaxial relations between in situ superconducting YBa2Cu3O7-x thin films and BaTiO3/MgAl2O4/Si substrates. Hwang, D. M.; Ramesh, R.; Chen, C. Y.; Wu, X. D.; Inam, A.; Hegde, M. S.; Wilkens, B.; Chang, C. C.; Nazar, L.; Venkatesan, T.; Miura, S.; Matsubara, S.; Miyasaka, Y.; Shohata, N. // Journal of Applied Physics;8/15/1990, Vol. 68 Issue 4, p1772 

    Analyzes epitaxial relations between in situ superconducting YBa[sub2]Cu[sub3]O[sub7-x] thin films and BaTiO[sub3]/MgAl[sub2]O[sub4]/Sl substrates. Application of transmission electron microscopy in investigating the layers; Observations on the behavior of the substrates; Evaluation of the...

  • Temperature dependence of microstructure and magnetic properties of Co/Ti multilayer thin films. Wu, Ping; Jiang, E. Y.; Wang, C. D.; Bai, H. L.; Wang, H. Y.; Liu, Y. G. // Journal of Applied Physics;6/1/1997, Vol. 81 Issue 11, p7301 

    The microstructural and magnetic properties of amorphous Co/Ti multilayer films and their variation with temperature are investigated by transmission electron microscopy (TEM) analysis and thermomagnetic measurements. Thermomagnetic curves showed two peaks at about 400 and 520 °C. The...

  • Magnetization and its temperature dependence in compositionally modulated amorphous Fe70B30-Ag films. Xiao, Gang; Chien, C. L.; Natan, M. // Journal of Applied Physics;4/15/1987, Vol. 61 Issue 8, p4314 

    Investigates the magnetic properties of compositionally modulated amorphous Fe[sub70]B[sub30]-Ag films. Method used to prepare the films; Description of the magnetometer which was used to study the magnetic properties of the films; Illustration of the cross-sectional transmission electron...

  • Thermal and ion-induced, metastable-cubic Al3M phases in Al-Ti and Al-Hf thin films. Hong, Q. Z.; Lilienfeld, D. A.; Mayer, J. W. // Journal of Applied Physics;11/1/1988, Vol. 64 Issue 9, p4478 

    Presents a study that examined the thermal and ion-induced reactions in codeposited, multilayer and bilayer aluminum-titanium and aluminum-hafnium thin films using transmission electron microscopy and Rutherford backscattering. Methodology; Analysis of the thermal annealing in the thin films;...

  • Interfaces and Roughness in a Multilayer Silicon Structure. Belyaeva, A. I.; Galuza, A. A.; Kolomiets, S. N. // Semiconductors;Sep2004, Vol. 38 Issue 9, p1012 

    The results of spectral ellipsometric studies of a complex multilayer system consisting of a Si substrate, a SiO2 layer, and a layer of polycrystalline Si are reported. A method for analysis of the multilayer structure is suggested; the method is based on a heavy dependence of experimental data...


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics