TITLE

Comment on ‘‘Ion-enhanced gas-surface kinetics: The Si-Cl2-Ar+ system’’ [Appl. Phys. Lett. 45, 860 (1984)]

AUTHOR(S)
Rossen, Rebecca A.; Sawin, Herbert H.
PUB. DATE
March 1985
SOURCE
Applied Physics Letters;3/15/1985, Vol. 46 Issue 6, p613
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Comments on an article about ion-enhanced gas surface kinetics of a silicon compound system published in the November 1984 issue of the periodical 'Applied Physics Letters.'
ACCESSION #
9817249

 

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