Spatial dependence of particle light scattering in an rf silane discharge

Roth, R. M.; Spears, K. G.; Stein, G. D.; Wong, G.
February 1985
Applied Physics Letters;2/1/1985, Vol. 46 Issue 3, p253
Academic Journal
A capacitively coupled, rf glow discharge of silane in argon was studied to determine the spatial dependence of particle light scattering. Light scattering from a pulsed laser at 500 nm shows sharp spatial peaks of scattered intensity near the electrodes. These scattering peaks are correlated with the plasma sheath edges because they exhibit spatial changes with discharge pressure characterized by a constant product of pressure and distance from the electrode. Light scattering at various silane mole fractions and gas flow rates is compatible with concepts of particle growth in sharp spatial zones near the plasma sheaths.


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