TITLE

Laser chemical vapor deposition of copper

AUTHOR(S)
Houle, F. A.; Jones, C. R.; Baum, T.; Pico, C.; Kovac, C. A.
PUB. DATE
January 1985
SOURCE
Applied Physics Letters;1/15/1985, Vol. 46 Issue 2, p204
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
The first laser-induced deposition of copper has been demonstrated using a volatile copper coordination complex. The technique is characterized by reasonable rates and by the high quality of copper produced.
ACCESSION #
9817033

 

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