Sequential observation of electromigration degradation in passivated Al stripes by interferometric optical scanning

Fortini, A.; Bosmans, R.; Hamel, J.
January 1985
Applied Physics Letters;1/15/1985, Vol. 46 Issue 2, p150
Academic Journal
It is shown that geometrical damages resulting from electrotransport in passivated Al stripes can easily be observed, with a resolution of a few nanometers, by means of an interferometric optical set allowing for sequential recordings in processing.


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