UV laser photodeposition of patterned catalyst films from adsorbate mixtures

Ehrlich, D. J.; Tsao, J. Y.
January 1985
Applied Physics Letters;1/15/1985, Vol. 46 Issue 2, p198
Academic Journal
Efficient catalysts for hydrocarbon polymerization have been prepared photochemically by reaction of mixed TiCl4 and Al2(CH3)6 adsorbate layers, in the scanned focus of a 257.2-nm laser beam. Monolayer coverages of the photodeposited catalyst have been shown effective for in situ patterned polymerization of ethylene and acetylene at room temperature from the vapor phase organic monomers. Three-micrometer spatial resolution has been obtained in selected-area polymer growth. The chemical kinetics of the mixed-adsorbate reactions and the effects of compositional changes on the catalytic activity of the laser-photodepostied films have been studied.


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