Cubic local order around Al and intermixing in short-period AlN/TiN multilayers studied by Al K-edge extended x-ray absorption fine structure spectroscopy and x-ray diffraction

Ersen, O.; Tuilier, M.-H.; Thomas, O.; Gergaud, P.; Lagarde, P.
May 2003
Applied Physics Letters;5/26/2003, Vol. 82 Issue 21, p3659
Academic Journal
Al K-edge extended x-ray absorption fine structure (EXAFS) experiments are performed on short-period TiN (50 nm)/AlN (Λ = 1, 2, 3, 5, and 15 nm) multilayers prepared by dc magnetron sputtering on MgO(100). It is shown that the local order around A1 is hexagonal down to A = 3 nm and becomes clearly cubic B1 rocksalt-type below this thickness. This phase transition is correlated with x-ray diffraction results, which reveal increased compressive stresses in TiN layers for Λ = 3 nm. In addition, EXAFS provides direct evidence of substitution of Ti for Al within AlN layers, as well as an estimation of Ti content as a function of layer thickness.


Related Articles

  • The orientation of Langmuir–Blodgett monolayers using NEXAFS. Outka, D. A.; Stöhr, J.; Rabe, J. P.; Swalen, J. D. // Journal of Chemical Physics;3/15/1988, Vol. 88 Issue 6, p4076 

    Carbon K-shell NEXAFS (near edge x-ray absorption fine structure) spectra of oriented hydrocarbon chains in Langmuir–Blodgett (LB) monolayers were measured and used to study the orientation of these molecules. The LB monolayers were assembled from arachidic acid or cadmium or calcium...

  • X-ray absorption fine structure study of short-range order of iron in Fe/Al multilayers. Meyer, Dirk C.; Richter, Kurt // Journal of Applied Physics;5/15/2000, Vol. 87 Issue 10, p7218 

    Presents information on a study which analyzed the short-range order of iron in iron/aluminum multilayers using x-ray absorption fine structure (XAFS). Information on fluorescence XAFS experiments combined with x-ray standing waves; Scattering properties of aluminum and iron; Conclusions.

  • Lattice Defect of Interfacial Layer in Superhard TiN/Si3N4 Multilayer Films Studied by Fluorescence X-Ray Absorption Fine Structure. Pan, Zhiyun; Sun, Zhihu; Xie, Zhi; Xu, Junhua; Kojima, Isao; Wei, Shiqiang // AIP Conference Proceedings;2007, Vol. 882 Issue 1, p449 

    Fluorescence x-ray absorption fine structure (XAFS) is used to study the local structures of super-hard TiN/Si3N4 multilayer films deposited by reactive magnetron sputtering at temperatures of 20, 200, 500 and 800 °C. The results clearly reveal the presence of interfacial intermixing between...

  • Standing-wave-assisted extended x-ray absorption fine-structure study of a Ni-Ti multilayer. Heald, S. M.; Tranquada, J. M. // Journal of Applied Physics;1/1/1989, Vol. 65 Issue 1, p290 

    Presents a study that made extended x-ray absorption fine structure (EXAFS) measurements while simultaneously exciting x-ray standing waves in a multilayer structure. Enhancement of the EXAFS signal from selected regions within the multilayer unit cell; Application of the technique to a...

  • Magnetic properties and short-range structure analysis of granular cobalt silicon nitride multilayers. Jiménez-Villacorta, F.; Espinosa, A.; Céspedes, E.; Prieto, C. // Journal of Applied Physics;Dec2011, Vol. 110 Issue 11, p113909 

    The magnetic properties and local order of cobalt/silicon nitride metal-insulator multilayered system have been studied. Magnetization characterization reveals an evolution of the magnetic features by varying the metal layer thickness. Results show that multilayers with larger metal thickness...

  • Variable Rowland radius laboratory EXAFS system. Yacoby, Y.; Brettschneider, M.; Bezalel, M. // Review of Scientific Instruments;Apr87, Vol. 58 Issue 4, p588 

    We report here on a new EXAFS laboratory facility. It features a variable Rowland radius with a source to bent crystal distance that can vary from 250 to 750 mm. It has a sample carrying table which is mechanically detached from the monochromator and can carry more than 50 lb with no effect on...

  • Determination of the local structure of NbO[sub 6] octahedra in the orthorhombic phase of a KNbO[sub 3] crystal using EXAFS. Bugaev, L. A.; Shuvaeva, V. A.; Alekseenko, I. B.; Zhuchkov, K. N.; Vedrinskii, R. V. // Physics of the Solid State;Jun98, Vol. 40 Issue 6, p1001 

    A new method proposed by us to determine the displacement direction of B atoms from centrosymmetric positions in ABO[sub 3] crystals is used to study the local atomic structure of KNbO[sub 3] in the orthorhombic phase. It is shown that the conventional treatment of the EXAFS yields serious...

  • An ultrasoft x-ray fluorescence detector for EXAFS measurements on low-Z elements. Maeyama, Satoshi; Oshima, Masaharu; Shoji, Takashi; Yamamoto, Hikoshi // Review of Scientific Instruments;Jan1991, Vol. 62 Issue 1, p58 

    An ultrahigh vacuum compatible x-ray detector has been developed for measuring the extended x-ray absorption fine structure (EXAFS) of low-Z elements (C,N,O) by fluorescence yield detection. The detector is a type of gas scintillation proportional counter, with a better energy resolution than...

  • A procedure for the manufacture of EXAFS samples of concentrated materials. Marcus, Matthew A.; Flood, William // Review of Scientific Instruments;Mar91, Vol. 62 Issue 3, p839 

    We describe a method of making samples of concentrated materials for use in fluorescence EXAFS (extended x-ray absorption fine structure) measurements. With this technique, one can easily make samples of a given areal density, with fine particle sizes. Both of these qualities are necessary in...


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics