Fabrication of a vector Hall sensor for magnetic microscopy

Gregušová, D.; Cambel, V.; Fedor, J.; Kúdela, R.; Šoltýs, J.; Lalinský, T.; Kostič, I.; Bending, S. J.
May 2003
Applied Physics Letters;5/26/2003, Vol. 82 Issue 21, p3704
Academic Journal
We have developed a micromachined Hall sensor for scanning the entire magnetic field vector whose active dimensions are an order of magnitude smaller (∼5 µm) than the smallest existing vector field sensor. It is realized by patterning three Hall probes on the tilted faces of epitaxy-overgrown GaAs-based pyramidal-shaped mesa structures. Data from these "tilted" Hall probes are used to reconstruct the full magnetic field vector.


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