Simulation and experiments research of acoustic field distribution in high frequency ultrasonic cleaning

XIE Aiyun; HUANG Yating; FENG Tao; DONG Xiuping
August 2014
Journal of Hebei University of Science & Technology;Aug2014, Vol. 35 Issue 4, p324
Academic Journal
High frequency ultrasonic, even megasonic bath cleaning has been one of the most successful techniques for nano-particle removal in semiconductor manufactural. The megasonic energy in sound field determines the cleaning effect, including the uniformity removal and object destruction cleaning. The distribution of sonic pressure in a wet cleaning bath is simulated based on normal mode decomposition theorem. The results show that megasonic wave can focus on the local area of sound radiation zone axis, and the distribution of wave nodes reflects the shape of vibration source, which is different from low frequency ultrasonic with diffuse sound energy. The measurement of ultrasonic sound pressure hydrophone is consistent with the theoretical results. The theory value is lower than the experiment value due to the cut-off error and nonlinear cavitation effect.


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