First results with a high-imaging speed scanning electron microscope

Fishbine, B. H.; Macy, R. J.
October 1990
Review of Scientific Instruments;Oct90, Vol. 61 Issue 10, p2534
Academic Journal
We have built a scanning electron microscope (SEM) capable of > 1 kHz framing rate, with the large depth of focus and high resolution which make SEM generally superior to light microscopes. SEM also permits submicron mapping of voltages or magnetic field lines on integrated circuits or observation of flux lattice processes in high temperature superconductors. Increasing framing rate by 10¹-10[sup 4] times that presently available (so-called TV rate—30-50 Hz) permits a variety of new dynamic microscopy studies. We refer to this microscope as a fast-scan electron microscope, or FSEM.


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