Versatile photostimulated exoelectron microscope with measurement capabilities in SEM mode

Yamamoto, Shigeyuki; Yokogawa, Hiroshi; Hashimoto, Hiroshi
October 1985
Review of Scientific Instruments;Oct85, Vol. 56 Issue 10, p1934
Academic Journal
Photostimulated exoelectron microscope (PSEM) for observing mechanically damaged surfaces has been developed, which enables one to observe a photostimulated exoelectron (PSE) image in an EXO mode and the corresponding secondary electron image of the same region in a SEM mode, without reassembling an electron optical system. Typical results obtained with this microscope are presented.


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