Magnetically driven micropositioners

Smith, Douglas P. E.; Elrod, Scott A.
October 1985
Review of Scientific Instruments;Oct85, Vol. 56 Issue 10, p1970
Academic Journal
Several designs are presented for micropositioners which use permanent magnets and current carrying coils to attain controlled displacements down to 5 nm while possessing a dynamic range of several centimeters. Angular displacements of less than 10-3 rad are also possible.


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